Team Leader：Yang Xiaojun

Team Members：Yin Huaidong, Wang Hailong, Zhao Wei, Wang Ting, Zhou Zhaozhao, Yang Tao, Li Tie, Song Chang, Li Xingyu, Ding Yang, Song Zhenzhong

Team Introduction

The Photon Manufacturing Team of Songshan Lake Materials Laboratory and the industrialization company Zhongke Xihe (Guangdong) Technology Co., Ltd. are engaged in long-term research on the theory and technology of ultrafast laser generation and the study of ultrafast phenomena in the interaction of light and matter. The Team is one of the first teams to join the Songshan Lake Materials Laboratory. The team has mastered a number of core technologies originated from the Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, including composite laser beam scanning modules, three-dimensional curved surface adaptive positioning, and rear surface injury protection. In the aerospace field, they have pioneered the development of laser precision machining equipment suitable for ultra-fine processing of aerospace propulsion systems. In the photovoltaic field, the Team and Zhongke Xihe have

jointly conducted research on "mechanisms of light-matter interaction," "high-speed trajectory controllable beam splitting scanning module," "high-power femtosecond laser," and other technologies. They have developed a series of ultra-precision processing equipment for the photovoltaic industry, including GW-level laser scribing equipment, GW-level laser edge cleaning equipment, and MW-level laser annealing equipment.

In the second phase, the focus is on the main battlefield of the national economy, developing laser equipment and production lines in the perovskite solar cell field and promoting their industrialization.

 

Industrialization Companies

1. Guangdong Zhongke Weijing Photon Manufacturing Technology Co., Ltd.

 -Established in December 2019

- Recognized as a "Specialized and New" SME in Guangdong Province in December 2023

- Focuses on the development, production, and sales of laser micro-machining equipment, providing excellent laser micro-machining solutions in fields such as electronic ceramics, PCB, FPC, and precision drilling.

2. Zhongke Xihe (Guangdong) Technology Co., Ltd.

- Established in April 2024

- Dedicates to the solar photovoltaic cell equipment field, adhering to long-termism, fully leveraging the advantages of incubated enterprises from research institutes, and aiming to become a world-leading provider of new energy equipment services and system solution integrators.

### Open Access 300mm Perovskite Cell Demonstration Line - Perovskite Industry-Academia-Research Cooperation Demonstration Platform

**For Universities and Research Institutes:**

- Provides free access to a 300mm perovskite cell demonstration platform (free equipment use, some free materials, basic processes free, and free training).

**For Equipment and Material Companies:**

- Offers a platform for feasibility verification of new technologies and process effect comparisons (e.g., feasibility of perovskite layer annealing and crystallization using pulsed laser).

**Reasons:**

- Universities and Research Institutes:** High technical verification threshold

- Enterprises:*Difficulty in introducing new technologies

 

**Background and Equipment:**

- Built by the Photon Manufacturing Team and the industrialization company Zhongke Xihe, with 12 core process equipment including laser, coating, ALD, PVD, and evaporation.

**Features:**

- Equipment Development and Verification Capability:Laser equipment developed by the Photon Team, technology from Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences; PVD equipment power supply developed by the plasma discharge team, technology from Harbin Institute of Technology. Future development and verification of new technologies and equipment such as laser annealing, laser packaging, laser film thickness non-destructive testing, and inkjet printing can rely on this line.

- High Process Compatibility:*Compatible with both dry and wet processes. Equipment required for tandem processes will be gradually equipped in the future to achieve tandem process compatibility.

- Comprehensive Material Characterization and Device Testing:** Relying on a platform with 1.5 billion yuan worth of equipment, it can provide material characterization and device testing for perovskite SEM, TEM, FIB, profilometer, film thickness tester, confocal, etc., enabling real-time characterization of materials during preparation.

**Significance:**

- As the first perovskite project in Songshan Lake, the demonstration line will lay the foundation for the development of perovskite technology in Songshan Lake.

- Using the free demonstration line as a link to promote the coordinated development of the perovskite industry-academia-research ecosystem in the Greater Bay Area, achieving a win-win situation for materials, processes, and equipment.

- In a certain sense, it proposes a new "platform+" operation mode for public technical service platforms in scientific research institutes.

### Equipment Showcase

1、300mm×300mm Perovskite Laser Scribing Equipment

- Advanced optical design, realizing Pl/P2/P3/P4 scribing

- Flat-top beam shaping + green picosecond laser to achieve depth-controlled scribing, reducing edge chipping and burrs

- Infrared nanosecond high-power laser meets the high-efficiency edge cleaning needs of perovskite P4

- High-precision linear motor, high accuracy, fast speed

- Equipped with dedicated fixtures and dust removal module

- CCD automatic positioning, software automatic correction

- Compatible with glove box enclosure, ordinary sheet metal or aluminum profile enclosure

- Designed for efficient scribing of perovskite solar cells, provided by the industrialization company Zhongke Xihe (Guangdong) Technology Co., Ltd., already mass-produced and available for sale.

 

2、Industrial-Grade Equipment - MW/GW P1 P2 P3 Laser Scribing Equipment

- Maximum scribing size: 2.4M*1.2M

- Mechanical/DOE/SLM splitting: 8-24 beams

- Beam energy consistency: >98%

- Independent power adjustment of each beam, adjustable scribing distance 5-10mm

- Scribing speed 2.5m/s, cycle time 30s/piece

 

3、2400mm×1200mm Perovskite Laser Scribing Equipment

- Developed for industry, MW/GW P1/P2/P3/P4 laser scribing equipment, first to develop and apply industry-leading SLM beam splitting technology, automatic following, automatic focusing, and automatic monitoring technology.